Location History:
- Setagaya-ku, JP (2003)
- Tokyo, JP (1985 - 2010)
Company Filing History:
Years Active: 1985-2010
Title: The Innovative Contributions of Izumi Tsukamoto
Introduction
Izumi Tsukamoto is a prominent inventor based in Tokyo, Japan. She has made significant contributions to the field of exposure apparatus technology, holding a total of 7 patents. Her work has been instrumental in advancing the capabilities of optical systems used in various applications.
Latest Patents
One of her latest patents is an exposure apparatus designed to expose multiple shot areas on a substrate to light through a liquid. This apparatus features a movable stage with a chuck that holds the substrate and a plate surrounding the chuck. It includes a projection optical system that projects light through an original onto the substrate. The apparatus is equipped with a first liquid supply nozzle positioned along the periphery of the final optical element and several second liquid supply nozzles on the stage. This innovative design allows for the efficient supply of liquid to the gap between the final optical element and the substrate, selecting the appropriate nozzle based on the exposure shot area's location.
Another notable patent is a substrate attracting and holding system for use in exposure apparatus. This method involves supporting a substrate using a protrusion on a holding table and reducing pressure between the holding table and the substrate to attract and hold it. The protrusion is strategically placed in relation to an alignment mark used for processing the substrate, ensuring precision in the manufacturing process.
Career Highlights
Throughout her career, Izumi Tsukamoto has worked with leading companies in the industry, including Canon and Mitsubishi Heavy Industries Limited. Her experience in these organizations has allowed her to develop and refine her innovative ideas, contributing to the advancement of technology in her field.
Collaborations
Izumi has collaborated with notable colleagues such as Hideki Nogawa and Itaru Fujita. These partnerships have fostered a creative environment that has led to groundbreaking advancements in exposure technology.
Conclusion
Izumi Tsukamoto's contributions to the field of exposure apparatus technology are noteworthy and impactful. Her innovative patents and collaborations with industry leaders highlight her role as a significant figure in the advancement of optical systems. Her work continues to influence the industry and inspire future innovations.