The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 1985
Filed:
Dec. 16, 1982
Minoru Yomoda, Kawasaki, JP;
Izumi Tsukamoto, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
Disclosed is a transfer apparatus provided with a first body having a plurality of alignment marks, a second body having a plurality of alignment marks, a projection optical system for projecting the image of the first body upon the second body, a probing device for probing the alignment marks of the first body and probing the alignment marks of the second body through the projection optical system, an operation device electrically coupled to the probing device and deriving a transfer error from the alignment error of the alignment marks, and a compensation device coupled to the operation device for eliminating the transfer error and for compensating for the projection optical system.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile