Hyunsoo Park

Title: Innovations of Hyunsoo Park in Integrated Circuit Technologies

Introduction

Hyunsoo Park is a notable inventor based in Portland, OR (US). He has made significant contributions to the field of integrated circuits, holding a total of 3 patents. His work focuses on advanced architectures and manufacturing methods that enhance the performance and efficiency of integrated circuits.

Latest Patents

Hyunsoo Park's latest patents include innovative methods and architectures for integrated circuit interconnect trenches and trench plugs. These inventions define separations between two adjacent trench ends, utilizing a multiple patterning process. An upper grating pattern is combined with a plug keep pattern to create a pattern accumulation layer, which is essential for defining plug masks. Subsequently, a lower grating pattern is summed with the plug masks to establish a pattern in trench interlayer dielectric (ILD) material. This material can then be backfilled with interconnect metallization, allowing for the fabrication of complex damascene interconnect structures at scaled-down geometries achievable through pitch-splitting techniques. In some embodiments, the trenches are strategically located between first spacer masks defined in a patterning process associated with the first grating pattern, while the plug masks are positioned based on a tone-inversion of second spacer masks linked to the second grating pattern.

Career Highlights

Hyunsoo Park is currently employed at Intel Corporation, where he continues to push the boundaries of integrated circuit technology. His work has been instrumental in developing advanced manufacturing techniques that are crucial for modern electronics.

Collaborations

Throughout his career, Hyunsoo Park has collaborated with esteemed colleagues, including Charles Henry Wallace and Mohit K Haran. These partnerships have fostered innovation and contributed to the advancement of integrated circuit technologies.

Conclusion

Hyunsoo Park's contributions to integrated circuit technologies through his patents and work at Intel Corporation highlight his role as a leading inventor in the field. His innovative approaches continue to shape the future of electronics and integrated circuit design.