Hyun-Kyu Kang

Title: Hyun-Kyu Kang: Innovator in Plasma Etching Technology

Introduction

Hyun-Kyu Kang is a notable inventor based in Seoul, South Korea. With a total of two patents to his name, Kang has made significant contributions to the field of plasma etching technology, particularly while working at Samsung Electronics Co., Ltd. His innovative techniques have streamlined various processes in semiconductor manufacturing.

Latest Patents

Kang's latest patents encompass two advanced methods:

1. **Methods of determining an etching end point based on compensation for etching disturbances** - This invention relates to a plasma etching process where an etch-stop condition is established by monitoring the luminous intensity of the plasma. By measuring the intensity at two different time intervals and applying compensation in the event of disturbances, Kang's method ensures more precise control over the etching process.

2. **Ion implanting apparatus and ion implanting method using the same** - This patent describes an improved ion implanting apparatus that features a rotatable disk and a charge sensor designed to monitor the wafer's charged state. The incorporation of feedback from the charge sensor facilitates better control and stability during the ion implantation process, thus enhancing overall efficiency.

Career Highlights

Throughout his career at Samsung Electronics Co., Ltd., Kang has focused on innovation in semiconductor processes. His work in developing techniques for both etching and ion implantation has positioned him as a key figure in advancing manufacturing technologies at one of the world's leading electronics companies.

Collaborations

Kang has collaborated with talented colleagues such as Gyeong-Su Keum and Seung-Ki Chae. Their combined expertise has likely contributed to the successful development of his patents and innovations, showcasing the collaborative spirit inherent in advanced research and development teams.

Conclusion

Hyun-Kyu Kang stands out as a visionary inventor whose work in plasma etching and ion implantation technology continues to shape the landscape of the semiconductor industry. As he contributes to the future of electronics at Samsung Electronics Co., Ltd., his patents reflect a commitment to excellence and innovation.