Company Filing History:
Years Active: 2004-2007
Title: Innovations of Inventor Hung-Hsin Liu
Introduction
Hung-Hsin Liu is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of microelectromechanical systems (MEMS) and holds a total of 5 patents. His work focuses on innovative manufacturing processes that enhance the functionality and efficiency of MEMS devices.
Latest Patents
Among his latest patents is a "Spacer fabrication process for manufacturing reflective stealth mirrors and other MEMS devices." This method involves forming an I-shape mirror structure, creating a spacer layer over it, and patterning the spacer layer to establish at least one spacer along the side of the mirror structure. Another notable patent is the "Method to remove fluorine residue from bond pads." This process utilizes reactive ion etching of AlFOoxide deposits on aluminum-containing bond pads, employing feed gases such as SF/CF/Ar or Cl/BCL/Ar to achieve effective removal of the deposits.
Career Highlights
Hung-Hsin Liu is currently associated with Taiwan Semiconductor Manufacturing Company Ltd., where he continues to innovate and develop advanced technologies in the semiconductor industry. His expertise in MEMS manufacturing processes has positioned him as a key figure in this rapidly evolving field.
Collaborations
He has collaborated with notable coworkers, including How-Cheng Tsai and Yuan-Ko Hwang, contributing to various projects that push the boundaries of technology and innovation.
Conclusion
Hung-Hsin Liu's contributions to the field of MEMS and his innovative patents reflect his dedication to advancing technology. His work not only enhances manufacturing processes but also paves the way for future innovations in the semiconductor industry.