Location History:
- Milpitas, CA (US) (2017)
- San Jose, CA (US) (2020)
Company Filing History:
Years Active: 2017-2020
Title: Huina Xu: Innovator in Scanning Electron Microscopy
Introduction
Huina Xu is a prominent inventor based in San Jose, CA, known for her contributions to the field of scanning electron microscopy. With a total of 2 patents, she has made significant advancements in the calibration and automated review processes of electron microscopes.
Latest Patents
One of her latest patents is titled "Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages." This invention focuses on the alignment of a scanning electron microscope's objective lens, allowing for fewer image acquisitions while still achieving accurate results. The method involves determining two different X-Y voltage pairs based on images, which can be applied to the Q4 lens or other optical components of the microscope.
Another notable patent is "Automated decision-based energy-dispersive x-ray methodology and apparatus." This invention relates to an automated method for reviewing defects detected in a defective die on a target substrate. The process includes obtaining electron-beam images of defects, classifying them based on morphology, and selecting specific types for automated energy-dispersive x-ray review. This innovative approach enhances the accuracy and usefulness of EDX results by combining morphological and elemental information.
Career Highlights
Huina Xu is currently employed at KLA-Tencor Corporation, where she continues to push the boundaries of technology in her field. Her work has been instrumental in improving the efficiency and effectiveness of scanning electron microscopy.
Collaborations
Throughout her career, Huina has collaborated with notable colleagues, including Harsh Sinha and Dmitry Spivak. These partnerships have contributed to her innovative research and development efforts.
Conclusion
Huina Xu's contributions to scanning electron microscopy through her patents and work at KLA-Tencor Corporation highlight her role as a leading inventor in the field. Her innovative techniques are paving the way for advancements in microscopy technology.
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