Kla Tencor Corporation

Huina Xu

Christopher Sears

Hong Xiao

Thanh Huy Ha

Hedong Yang

Harsh Sinha

Rohit Bothra

Jianwei Wang

Ichiro Honjo

Dmitry Spivak

Objective lens alignment of a scanning electron microscope review tool with fewer image acquisitions can be obtained using the disclosed techniques and systems. Two different X-Y voltage pairs for the scanning electron microscope can be determined based on images. A second image based on the first X-Y voltage pair can be used to determine a second X-Y voltage pair. The X-Y voltage pairs can be applied at the Q4 lens or other optical components of the scanning electron microscope.

Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages

One embodiment relates to a method for automated review of defects detected in a defective die on the target substrate. The method includes: performing an automated review of the defects using an secondary electron microscope (SEM) so as to obtain electron-beam images of the defects; performing an automated classification of the defects into types based on morphology of the defects as determined from the electron-beam images; selecting defects of a specific type for automated energy-dispersive x-ray (EDX) review; and performing the automated EDX review on the defects of the specific type. In addition, automated techniques are disclosed for obtaining an accurate reference so as to improve the usefulness of the EDX results. Furthermore, an automated method of classifying the defects based on the EDX results is disclosed which provides a final pareto that combines both morphological and elemental information. Other embodiments, aspects and features are also disclosed.

Automated decision-based energy-dispersive x-ray methodology and apparatus

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San Jose, CA, United States of America

Huina Xu