The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2020
Filed:
Aug. 09, 2017
Kla-tencor Corporation, Milpitas, CA (US);
Ichiro Honjo, Santa Clara, CA (US);
Christopher Sears, San Jose, CA (US);
Hedong Yang, Santa Clara, CA (US);
Thanh Ha, Milpitas, CA (US);
Jianwei Wang, San Jose, CA (US);
Huina Xu, San Jose, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Objective lens alignment of a scanning electron microscope review tool with fewer image acquisitions can be obtained using the disclosed techniques and systems. Two different X-Y voltage pairs for the scanning electron microscope can be determined based on images. A second image based on the first X-Y voltage pair can be used to determine a second X-Y voltage pair. The X-Y voltage pairs can be applied at the Q4 lens or other optical components of the scanning electron microscope.