This inventor holds 2 USPTO granted patents and 3 published patent applications. Top assignee: Carl Zeiss Smt Gmbh. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Innovations by Hubertus Marbach
Introduction
Hubertus Marbach is a notable inventor based in Grossostheim, Germany. He has made significant contributions to the field of particle beam technology, holding 2 patents that showcase his innovative approach to analyzing and processing samples.
Latest Patents
One of his latest patents is titled "Apparatus for analyzing and/or processing a sample with a particle beam and method." This invention includes a providing unit for delivering the particle beam and a shielding element designed to protect against electric fields generated by charges accumulated on the sample. The shielding element features a through opening that allows the particle beam to pass through towards the sample. Additionally, the apparatus is equipped with a detecting unit to monitor the actual position of the shielding element and an adjusting unit to reposition it as needed.
Another significant patent is "Method and apparatus for mask repair." This invention pertains to methods and apparatuses for processing objects used in lithography. The method involves providing a first gas and a second gas, which includes molecules capable of performing an inversion oscillation. A particle beam is then introduced in a working region of the object to produce deposition material based on the gases provided.
Career Highlights
Hubertus Marbach is currently employed at Carl Zeiss SMT GmbH, a company renowned for its advancements in optical systems and technology. His work at this esteemed organization has allowed him to further develop his innovative ideas and contribute to cutting-edge research in his field.
Collaborations
Throughout his career, Hubertus has collaborated with talented individuals such as Daniel Rhinow and Nicole Auth. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.
Conclusion
Hubertus Marbach's contributions to the field of particle beam technology are noteworthy, and his patents reflect his innovative spirit. His work at Carl Zeiss SMT GmbH and collaborations with fellow professionals further enhance his impact on the industry.