The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
Mar. 15, 2023
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Elke Hoinkis, Hessen, DE;
Ottmar Hoinkis, Darmstadt, DE;
Jan Guentner, Gross-Zimmern, DE;
Daniel Rhinow, Frankfurt am Main, DE;
Hubertus Marbach, Grossostheim, DE;
Nicole Auth, Ginsheim-Gustavsburg, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An apparatus for analyzing and/or processing a sample with a particle beam includes a providing unit for providing the particle beam, and a shielding element for shielding an electric field (E) generated by charges (Q) accumulated on the sample. The shielding element has a through opening for the particle beam to pass through towards the sample. The apparatus further includes a detecting unit configured to detect an actual position of the shielding element, and an adjusting unit for adjusting the shielding element from the actual position into a target position.