Huang-Jen Hsu

Title: Innovations of Huang-Jen Hsu

Introduction

Huang-Jen Hsu is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patents. With a total of 2 patents, Hsu continues to push the boundaries of technology in his industry.

Latest Patents

Hsu's latest patents include the "CMP Safe Alignment Mark" and the "Slurry Supply System for CMP Process." The CMP Safe Alignment Mark patent describes techniques for creating an alignment mark on a wafer. This involves etching a recess in a first surface region of the wafer, forming a device structure in a second surface region, and depositing a dielectric layer that fills the recess. A first planarization procedure is then conducted, followed by a second planarization procedure to device structures on the second surface region. The Slurry Supply System for CMP Process patent relates to a slurry distribution system that connects a mixing tank to a CMP tool. This system generates a polishing mixture that enables mechanical polishing of a workpiece, with an energy source preventing the accumulation of abrasive particles within the transport piping.

Career Highlights

Huang-Jen Hsu works at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing the processes involved in semiconductor fabrication. Hsu's innovative approaches have contributed to the efficiency and effectiveness of manufacturing techniques.

Collaborations

Hsu collaborates with notable colleagues, including Feng-Inn Wu and Sheng-Chen Wang. Their combined expertise fosters a creative environment that enhances the development of new technologies.

Conclusion

Huang-Jen Hsu is a key figure in the semiconductor industry, known for his innovative patents and contributions to manufacturing processes. His work continues to influence the field and drive advancements in technology.