Location History:
- Hsin-Chu, TW (2004)
- Youkan, TW (2005)
Company Filing History:
Years Active: 2004-2005
Title: Hsueh-Li Sun: Innovator in Microelectronic Fabrication
Introduction
Hsueh-Li Sun is a prominent inventor based in Youkan, Taiwan. She has made significant contributions to the field of microelectronics, particularly in ion implantation techniques. With a total of 2 patents, her work has advanced the efficiency and precision of semiconductor manufacturing processes.
Latest Patents
One of her latest patents is titled "Method of Monitoring High Tilt Angle of Medium Current Implant." This method involves monitoring and adjusting the position of a wafer concerning an ion beam. It includes setting the position of a wafer holder to achieve a tilt angle of 45 degrees and a twist angle of 45 degrees. The process also entails implanting boron species into a region of the wafer at 160 KeV and a dose level of 5.0×10 atoms/cm. Periodic measurements of the sheet resistivity of the implanted wafer are conducted, with adjustments made to the wafer tilt angle when the sheet resistivity exceeds 30 ohms/square.
Another significant patent is "Ion Implant Method for Topographic Feature Corner Rounding." This method focuses on ion implantation into the corners of topographic features within a microelectronic substrate. The technique aims to round the corners effectively during the thermal oxidation of the substrate. The implanting ions used can include silicon, germanium, arsenic, phosphorus, and boron, enhancing process efficiency.
Career Highlights
Hsueh-Li Sun is currently employed at Taiwan Semiconductor Manufacturing Company Ltd. Her innovative approaches have positioned her as a key figure in the semiconductor industry. Her work not only contributes to the advancement of technology but also sets new standards for microelectronic fabrication.
Collaborations
Throughout her career, Hsueh-Li Sun has collaborated with notable colleagues, including Jie-Shing Wu and Hung-Ta Huang. These collaborations have fostered an environment of innovation and have led to the development of groundbreaking techniques in the field.
Conclusion
Hsueh-Li Sun's contributions to microelectronic fabrication through her patents and innovative methods have significantly impacted the semiconductor industry. Her work continues to inspire advancements in technology and efficiency in manufacturing processes.