Location History:
- Kaoshiung, TW (2004)
- Kaohsiung, TW (2004 - 2006)
Company Filing History:
Years Active: 2004-2006
Title: How-Cheng Tsai: Innovator in Semiconductor Technology
Introduction
How-Cheng Tsai is a prominent inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on innovative methods that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of How-Cheng Tsai's latest patents is a method to remove fluorine residue from bond pads. This process involves reactive ion etching of AlFOoxide deposits on aluminum-containing bond pads using feed gases such as SF/CF/Ar or Cl/BCL/Ar. The active plasma etches the AlFOoxide deposits through both physical and chemical etching, ensuring a more complete removal of the deposits. Another notable patent is for a method for metal etchback with a self-aligned etching mask. This method improves the planarity and electrical resistance of metal-filled semiconductor features. It includes a semiconductor wafer with an etched opening lined with a refractory metal containing layer and a blanket deposited metal layer filling the opening. The process involves spin coating a selected layer over the metal, followed by a series of dry etching steps to achieve a substantially planar metal-filled etched opening.
Career Highlights
How-Cheng Tsai is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate and develop new technologies. His work has had a significant impact on the semiconductor industry, contributing to advancements in manufacturing techniques and product quality.
Collaborations
Throughout his career, How-Cheng Tsai has collaborated with notable colleagues, including Hung-Hsin Liu and Kwang-Chen Wu. These collaborations have fostered a productive environment for innovation and have led to the development of cutting-edge technologies in semiconductor manufacturing.
Conclusion
How-Cheng Tsai is a distinguished inventor whose work in semiconductor technology has led to several important patents. His innovative methods are paving the way for advancements in the industry, and his contributions are highly valued.