Hon-Hung Lui

Title: Hon-Hung Lui: Innovator in Semiconductor Technology

Introduction

Hon-Hung Lui is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His innovative work has advanced the methods used in semiconductor fabrication, particularly in the area of contact openings and landing pads.

Latest Patents

One of Hon-Hung Lui's latest patents is titled "Low resistance poly landing pad." This patent discloses a method for forming a low resistance poly landing pad by shunting the polysilicon of a landing pad with metallic conductors. The process involves opening a window through a first dielectric layer to expose a conducting region over a semiconductor substrate. A metallic layer is deposited overall, followed by a polysilicon layer, which fills the window completely. The method includes chemical and mechanical polishing to remove excess metal and polysilicon, providing global planarization. Salicidation is then applied to cover the exposed surface of polysilicon, followed by the deposition of a second dielectric and the formation of an opening to the landing pad.

Another notable patent is the "Method of forming a modified metal contact opening to decrease its aspect ratio." This method begins with the formation of a first insulating layer and a first barrier layer, which has a barrier opening over a substrate. The first insulating layer is anisotropically etched to create an upper contact hole. A second barrier layer is then formed and etched to create spacers on the sidewalls of the first insulating layer. The first insulating layer is further etched to form a lower contact hole, resulting in a reduced aspect ratio contact hole that is filled with contact metal to connect with the substrate.

Career Highlights

Hon-Hung Lui is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in developing advanced fabrication techniques that enhance the performance and reliability of semiconductor devices.

Collaborations

Throughout his career, Hon-Hung Lui has collaborated with notable colleagues, including Yi-Te Chen and Kun-Jung Chuang. These collaborations have contributed to the successful development of innovative technologies in the semiconductor field.

Conclusion

Hon-Hung Lui's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in