Company Filing History:
Years Active: 2003-2016
Title: Holger Weigand: Innovator in Microlithography and Particle Optics
Introduction
Holger Weigand is a notable inventor based in Oberkochen, Germany. He has made significant contributions to the fields of microlithography and particle optics, holding two patents that showcase his innovative spirit and technical expertise.
Latest Patents
Weigand's latest patents include an illumination system for EUV microlithography. This system features an EUV light source that generates illumination light with an etendue exceeding 0.01 mm. The light source produces a sequence of EUV light pulses at a specific frequency. The illumination optics guide this light from the source to an object field, enhancing the homogeneity of the illumination. Another patent involves a particle-optical component and system, which includes a magnetic lens assembly designed to provide a magnetic deflection field for a beam of charged particles. This assembly features a focusing lens device that creates a magnetic field with rotational symmetry, allowing for precise control over the optical axis of the beam.
Career Highlights
Throughout his career, Holger Weigand has worked with esteemed companies such as Carl Zeiss SMT AG and Carl Zeiss SMT GmbH. His experience in these organizations has allowed him to develop and refine his innovative ideas in advanced optical systems.
Collaborations
Weigand has collaborated with notable colleagues, including Oliver Kienzle and Michael Layh. These partnerships have contributed to the advancement of his projects and the successful development of his patents.
Conclusion
Holger Weigand's contributions to microlithography and particle optics demonstrate his commitment to innovation and excellence in technology. His patents reflect a deep understanding of complex optical systems and their applications in modern science.