Hiroyuki Iino

Title: Hiroyuki Iino: Innovator in Coating Technology

Introduction

Hiroyuki Iino is a distinguished inventor based in Nirasaki, Japan, known for his significant contributions to coating technology with a total of four patents to his name. His work focuses on methodologies and apparatuses that enhance the efficiency and effectiveness of applying coatings.

Latest Patents

Hiroyuki Iino's latest patents showcase his ingenuity in the field. One of his notable inventions is a "Method of forming coating film and apparatus therefor." This apparatus features a spin chuck that supports a substrate while rotating it about a vertical axis. It includes two nozzles; a first nozzle for supplying a solvent of a coating solution, and a second nozzle that delivers the coating solution to the center of the substrate. The design allows for precise application and diffusion of the substances along the substrate’s surface through rotation.

Another significant patent is the "Resist processing apparatus." This invention involves a processing solution supply system designed to facilitate resist processing. The apparatus features a nozzle for supplying processing solutions, a feeding arrangement to convey the solution, and a deaeration mechanism to remove gaseous components from the processing solution. This mechanism, featuring a closed vessel, improves the quality of the processing solution utilized in the resist process.

Career Highlights

Throughout his career, Hiroyuki Iino has held positions at prominent companies in the technology sector. He has worked for Tokyo Electron Limited and Tokyo Electron Kyushu Limited, where he further developed his expertise in coating technologies and innovation in processing solutions.

Collaborations

In his professional journey, Hiroyuki has collaborated with notable colleagues, including Keizo Hasebe and Akihiro Fujimoto. These collaborations indicate a rich exchange of ideas and innovation in the field of coating technologies.

Conclusion

Hiroyuki Iino’s patents illustrate his commitment to advancing coating technology, showcasing innovative methods and equipment that improve processing efficiency. His contributions have been vital to the industry, marking him as a notable figure among inventors in Japan.