Location History:
- Yamanashi-Ken, JP (1998)
- Kofu, JP (1996 - 2000)
- Nirasaki, JP (2011)
Company Filing History:
Years Active: 1996-2011
Title: The Innovative Contributions of Hiroshi Kobayashi
Introduction
Hiroshi Kobayashi is a notable inventor based in Kofu, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on advanced methods for film formation and interconnection in semiconductor devices.
Latest Patents
Kobayashi's latest patents include an insulating film forming method and a multilevel interconnection forming method for semiconductors. The insulating film forming method involves a plasma nitriding process applied to an oxide film on a substrate, followed by annealing the substrate in a low-pressure environment of 667 Pa or lower. This annealing process is performed for either 5 or 45 seconds. The plasma nitriding is executed using microwave plasma with a planar antenna featuring multiple slot holes. The multilevel interconnection forming method entails depositing a metal film containing aluminum on an insulating film of a substrate, followed by patterning the metal film to create a wiring layer. An interlayer dielectric film is then formed over the wiring layer, and a hole is created to allow selective deposition of aluminum via a CVD method. This process ensures that the aluminum fills the hole without exceeding a volume ratio of 100%. The method concludes with the formation of a metal layer that is reflowed to fill the hole completely and planarize the surface.
Career Highlights
Throughout his career, Hiroshi Kobayashi has worked with prominent companies such as Tel-Varian Limited and Tokyo Electron Limited. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.
Collaborations
Kobayashi has collaborated with notable colleagues, including Yuichi Wada and Jiro Katsuki. Their combined efforts have further advanced the field of semiconductor technology.
Conclusion
Hiroshi Kobayashi's innovative work in semiconductor technology, particularly in film formation and interconnection methods, showcases his significant contributions to the industry. His patents reflect a commitment to advancing technology and improving semiconductor manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.