This inventor holds 6 USPTO granted patents. Top assignees: Sumitomo Osaka Cement Co., Ltd., Tokyo Electron Limited. Active years: 2004-2012.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Tokyo, JP (2005)
- Funabashi, JP (2004 - 2012)
Company Filing History:

Years Active: 2004-2012
Title: Hiroshi Inazumachi: Innovator in Electrostatic Chuck Devices
Introduction
Hiroshi Inazumachi is a notable inventor based in Funabashi, Japan. He has made significant contributions to the field of electrostatic chuck devices, holding a total of 6 patents. His work focuses on enhancing the performance and efficiency of plasma processing apparatuses.
Latest Patents
Inazumachi's latest patents include innovative designs for electrostatic chuck devices. One of his patents describes an electrostatic chuck device that features an electrostatic chuck section, a metal base section, and a dielectric plate. This device is designed to improve the in-plane uniformity of electric field intensity during plasma processes. Another patent outlines a similar electrostatic chuck device that incorporates a composite sintered body containing insulating ceramic and silicon carbide, ensuring high performance in plasma processing applications.
Career Highlights
Throughout his career, Inazumachi has worked with prominent companies such as Sumitomo Osaka Cement Co., Ltd. and Tokyo Electron Limited. His experience in these organizations has contributed to his expertise in developing advanced electrostatic chuck technologies.
Collaborations
Inazumachi has collaborated with notable colleagues, including Mamoru Kosakai and Yukio Miura. Their combined efforts have led to advancements in the field of electrostatic chuck devices.
Conclusion
Hiroshi Inazumachi's contributions to the development of electrostatic chuck devices have significantly impacted the field of plasma processing. His innovative patents and collaborations with industry professionals highlight his role as a leading inventor in this technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile