Location History:
- Koshi, JP (2013 - 2014)
- Kumamoto, JP (2013 - 2022)
Company Filing History:
Years Active: 2013-2022
Title: Innovator Hiromitsu Namba: Pioneering Substrate Processing Technologies
Introduction: Hiromitsu Namba, an accomplished inventor based in Kumamoto, Japan, has made significant contributions to the field of substrate processing. With a total of 12 patents to his name, Namba's work focuses on enhancing the efficiency and effectiveness of substrate processing apparatuses and methods.
Latest Patents: Namba's latest patents demonstrate his innovative approach to substrate processing technologies. One of his notable inventions is a substrate processing apparatus that features a substrate holder for horizontal substrate support, complemented by a rotation driver for movement. This apparatus includes a first processing liquid nozzle that delivers processing liquid to the substrate's peripheral regions and incorporates two gas supply sources. The first gas supply source heats gas to a specific temperature for optimal processing conditions, while the second gas supply source manages a different temperature for precise processing on the substrate's inner side. Another recent invention is similar in nature but introduces a second processing liquid nozzle that supplies a lower temperature liquid, along with distinct gas supply ports for advanced processing applications.
Career Highlights: Namba is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing sector. His innovative spirit and technical expertise have contributed greatly to the company's advancements in substrate processing technologies.
Collaborations: Throughout his career, Namba has collaborated with esteemed colleagues, including Fitrianto and Yoichi Tokunaga. Their collective efforts have fueled advances and innovations within the field, showcasing the importance of teamwork in achieving remarkable technological developments.
Conclusion: Hiromitsu Namba exemplifies the dedication and creativity of modern inventors. His contributions to substrate processing not only advance technology but also inspire future innovations in the field. As he continues to develop new methods and apparatuses, his impact on the industry remains profound and influential.