Nara, Japan

Hiroki Tabuchi


Average Co-Inventor Count = 3.5

ph-index = 6

Forward Citations = 202(Granted Patents)


Company Filing History:


Years Active: 1987-2000

Loading Chart...
10 patents (USPTO):Explore Patents

Title: Hiroki Tabuchi: Innovator in Semiconductor Technology

Introduction

Hiroki Tabuchi is a prominent inventor based in Nara, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 10 patents. His innovative work has paved the way for advancements in photomask design and resist pattern formation.

Latest Patents

One of Hiroki Tabuchi's latest patents is a photomask utilizing an auxiliary pattern that is not transferred. This photomask is designed for use in semiconductor manufacturing and includes a chrome pattern that serves as a mask pattern. The chrome pattern is formed to have a size substantially equivalent to the wavelength of exposure light, with intervals that are also equivalent to the wavelength. Additionally, the photomask incorporates auxiliary patterns that function to reduce exposure light or shift its phase, thereby enhancing the precision of resist pattern formation.

Another notable patent is a method for forming a fine resist pattern. This method involves several steps, including forming a resist layer on a semiconductor substrate and creating a phase-shifting pattern in the upper portion of the resist layer. The process culminates in the formation of a fine resist pattern that meets the desired specifications.

Career Highlights

Hiroki Tabuchi has worked with notable companies in the semiconductor industry, including Sharp Corporation and Sharp Microelectronics Technology, Inc. His experience in these organizations has contributed to his expertise and innovative capabilities in semiconductor technology.

Collaborations

Throughout his career, Hiroki has collaborated with talented individuals such as Makoto Tanigawa and Takayuki Taniguchi. These collaborations have fostered a creative environment that has led to significant advancements in their respective fields.

Conclusion

Hiroki Tabuchi is a distinguished inventor whose work in semiconductor technology has resulted in multiple patents and innovative methods. His contributions continue to influence the industry and inspire future advancements in technology.

This text is generated by artificial intelligence and may not be accurate.
Please report any incorrect information to support@idiyas.com
Loading…