The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 1991
Filed:
Dec. 29, 1989
Takashi Sugihara, Ryugasaki, JP;
Kazutaka Uda, Nara, JP;
Hiroki Tabuchi, Nara, JP;
Shuji Miyoshi, Yamatokouriyama, JP;
Yasuhiko Inami, Nara, JP;
Nobuo Hashizume, Nara, JP;
Hisatoshi Furubayashi, Yamatokouriyama, JP;
Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
A moisture-sensitive device comprising a substrate such as silicon substrate, a pair of belt-like heating elements extending over recesses formed in the substrate, the heating elements being composed of a resistive film of platinum or nickel and a heat-resistant insulating film covering the resistive film in which one of the heating elements acts as a detector element and the other as a reference element, which device can exactly determine an absolute humidity irrespective of sudden changes of temperature.