Hiroho Kitada

Title: Hiroho Kitada: Innovator in Electrostatic Technology

Introduction

Hiroho Kitada is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of electrostatic technology, holding 2 patents that showcase his innovative spirit and technical expertise.

Latest Patents

One of his latest patents is an electrostatic chuck and processing apparatus. This invention features a Johnsen-Rahbek force type electrostatic chuck that includes a metal substrate and an electrode for electrostatic attraction. An insulating layer is interposed between the metal substrate and the electrode, while a dielectric layer constitutes an electrostatic attraction surface in contact with a workpiece. The dielectric layer is enhanced with a ceramic spray coating and a sealing component that fills the pores of the ceramic spray coating. This sealing component contains a metal organic salt with a rare earth element, improving the efficiency of the electrostatic chuck.

Another notable patent is a plasma processing apparatus. In this invention, an additional viewing window is placed between an infrared temperature sensor and a view window. This additional window is cooled to maintain a temperature between 20°C to 25°C, which helps to reduce and stabilize electromagnetic waves emitted from the viewing window. By correcting the value of these electromagnetic waves, the measurement precision of the temperature monitor is significantly increased, allowing for stable measurement and control of the dielectric window temperature.

Career Highlights

Hiroho Kitada has worked with several esteemed companies, including Hitachi High-Tech Corporation and Tocalo Co., Ltd. His experience in these organizations has contributed to his development as an inventor and has provided him with a platform to innovate in the field of electrostatic technology.

Collaborations

Throughout his career, Kitada has collaborated with notable colleagues such as Takeshi Takabatake and Tomohiro Nakasuji. These collaborations have likely fostered an environment of creativity and innovation, leading to advancements in their respective fields.

Conclusion

Hiroho Kitada is a distinguished inventor whose work in electrostatic technology has led to significant advancements. His patents reflect a deep understanding of the technical challenges in his field and a commitment to innovation. His contributions continue to influence the industry and inspire future inventors.