The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2024
Filed:
Dec. 24, 2020
Tocalo Co., Ltd., Kobe, JP;
Hitachi High-tech Corporation, Tokyo, JP;
Takeshi Takabatake, Akashi, JP;
Tomohiro Nakasuji, Akashi, JP;
Akira Itoh, Akashi, JP;
Kentaro Seto, Fukuoka, JP;
Yutaka Omoto, Tokyo, JP;
Hiroho Kitada, Tokyo, JP;
Kazuumi Tanaka, Tokyo, JP;
TOCALO CO., Ltd., Kobe, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
A Johnsen-Rahbek force type electrostatic chuck including: a metal substrate; an electrode for electrostatic attraction provided on the metal substrate with an insulating layer interposed between the metal substrate and the electrode for electrostatic attraction; and a dielectric layer constituting an electrostatic attraction surface in contact with a workpiece. The dielectric layer includes a ceramic spray coating and a sealing component with which pores of the ceramic spray coating are filled, and the sealing component contains a metal organic salt containing a rare earth element.