Kentaro Seto

Title: Kentaro Seto: Innovator in Electrostatic Technology

Introduction

Kentaro Seto is a prominent inventor based in Fukuoka, Japan. He is known for his contributions to the field of electrostatic technology, particularly through his innovative patent related to electrostatic chucks.

Latest Patents

Kentaro Seto holds a patent for an electrostatic chuck and processing apparatus. This invention features a Johnsen-Rahbek force type electrostatic chuck that includes a metal substrate and an electrode for electrostatic attraction. An insulating layer is interposed between the metal substrate and the electrode, while a dielectric layer constitutes the electrostatic attraction surface in contact with a workpiece. The dielectric layer is composed of a ceramic spray coating and a sealing component that fills the pores of the ceramic spray coating. Notably, the sealing component contains a metal organic salt that includes a rare earth element. This patent showcases his innovative approach to enhancing electrostatic chuck technology.

Career Highlights

Throughout his career, Kentaro Seto has worked with notable companies such as Tocalo Co., Ltd. and Hitachi High-Tech Corporation. His experience in these organizations has contributed significantly to his expertise in electrostatic technology and innovation.

Collaborations

Kentaro has collaborated with esteemed colleagues, including Takeshi Takabatake and Tomohiro Nakasuji. These collaborations have further enriched his work and contributed to advancements in the field.

Conclusion

Kentaro Seto is a distinguished inventor whose work in electrostatic technology has made a significant impact. His innovative patent and collaborations reflect his dedication to advancing the field.