This inventor holds 5 USPTO granted patents and 1 published patent application. Top assignees: Hitachi High-Tech Corporation, Hitachi-High-Technologies Corporation, Tocalo Co., Ltd.. Active years: 2019-2024.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
4 out of 1,395 
1 out of 2,874 
1 out of 56 Years Active: 2019-2024
Title: Kazuumi Tanaka: Innovator in Electrostatic Technology
Introduction
Kazuumi Tanaka is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of electrostatic technology, holding a total of five patents. His work has been instrumental in advancing the capabilities of processing apparatuses used in various industries.
Latest Patents
One of Tanaka's latest patents is the "Electrostatic Chuck and Processing Apparatus." This invention features a Johnsen-Rahbek force type electrostatic chuck that includes a metal substrate and an electrode for electrostatic attraction. An insulating layer is interposed between the metal substrate and the electrode, while a dielectric layer constitutes an electrostatic attraction surface in contact with a workpiece. Notably, the dielectric layer incorporates a ceramic spray coating and a sealing component that fills the pores of the ceramic spray coating. The sealing component contains a metal organic salt with a rare earth element, enhancing the performance of the electrostatic chuck. Another significant patent is the "Ion Shield Plate for Plasma Processing Apparatus," which further showcases his innovative approach to electrostatic applications.
Career Highlights
Throughout his career, Kazuumi Tanaka has worked with notable companies, including Hitachi High-Tech Corporation and Hitachi High-Technologies Corporation. His experience in these organizations has allowed him to develop and refine his inventions, contributing to advancements in technology.
Collaborations
Tanaka has collaborated with talented individuals in his field, including Kouji Okuda and Yusuke Nakatani. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.
Conclusion
Kazuumi Tanaka's contributions to electrostatic technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry, paving the way for future innovations.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile