Akashi, Japan

Tomohiro Nakasuji


Average Co-Inventor Count = 7.0

ph-index = 1


Company Filing History:


Years Active: 2024

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1 patent (USPTO):Explore Patents

Title: The Innovations of Tomohiro Nakasuji: A Pioneer in Electrostatic Technology

Introduction: Tomohiro Nakasuji, an accomplished inventor hailing from Akashi, Japan, has made significant contributions to the field of electrostatic technology. With one registered patent to his name, Nakasuji's work has laid the groundwork for advancements in processing apparatuses that employ electrostatic forces for various industrial applications.

Latest Patents: Nakasuji's most notable patent is the electrostatic chuck and processing apparatus. This innovative design features a Johnsen-Rahbek force type electrostatic chuck that includes a metal substrate and an electrode for electrostatic attraction. Key elements of this invention are the insulating layer placed between the metal substrate and the electrode, as well as a dielectric layer that forms the electrostatic attraction surface in contact with a workpiece. Remarkably, the dielectric layer comprises a ceramic spray coating and a sealing component designed to fill the pores of the ceramic coating. This sealing component contains a metal organic salt that includes a rare earth element, enhancing the performance and reliability of the electrostatic chuck.

Career Highlights: Throughout his career, Tomohiro Nakasuji has worked with prominent companies, enhancing his expertise and understanding of electrostatic technology. Notably, he has been associated with Tocalo Co., Ltd., and Hitachi High-Tech Corporation, where he contributed to various projects and research initiatives aimed at improving processing techniques and tools.

Collaborations: During his professional journey, Nakasuji has collaborated with esteemed colleagues, including Takeshi Takabatake and Akira Itoh. These partnerships have allowed for the exchange of ideas and insights, furthering the development of innovative solutions in the field of electrostatic processing.

Conclusion: Tomohiro Nakasuji stands out as a key inventor in the realm of electrostatic technology. His pioneering patent showcases a unique approach to electrostatic attraction that has potential implications for various industries. With a solid foundation in both collaboration and professional experience, Nakasuji's contributions continue to inspire advancements in innovation and technology.

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