Kumamoto, Japan

Hidetomo Uemukai


Average Co-Inventor Count = 3.3

ph-index = 1

Forward Citations = 5(Granted Patents)


Location History:

  • Kumamoto-ken, JP (2008)
  • Kumamoto, JP (2018)

Company Filing History:


Years Active: 2008-2018

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2 patents (USPTO):Explore Patents

Title: Innovations by Inventor Hidetomo Uemukai: Pioneering Substrate Processing Solutions

Introduction: Hidetomo Uemukai, a notable inventor based in Kumamoto, Japan, has significantly contributed to the field of substrate processing with his innovative solutions. With two registered patents to his name, Uemukai has developed technologies that enhance the efficiency of semiconductor manufacturing processes.

Latest Patents: Uemukai’s recent patents include a "Substrate Processing Apparatus" and a "Cleaning Processing System and Cleaning Processing Apparatus." The substrate processing apparatus incorporates a mixing tank designed to facilitate the mixing of two liquids, optimizing flow rates through a control unit that manages their application during substrate processing. This innovation allows for precise adjustments based on the mixture ratios of the first and second liquids, streamlining the substrate treatment process.

His cleaning processing apparatus introduces an advanced cleaning processing section designed for semiconductor wafers. The system is equipped with multiple scrub cleaning units organized in an effective arrangement to ensure thorough cleaning. This innovative structure includes a wafer inversion unit and a main wafer transfer mechanism, significantly enhancing the cleaning efficiency for wafers during manufacturing.

Career Highlights: Uemukai is currently associated with Tokyo Electron Limited, a leading company in the semiconductor equipment sector. His work focuses on enhancing the capabilities and efficiency of semiconductor production tools, positioning him as a key figure in the industry.

Collaborations: Throughout his career, Uemukai has collaborated with notable colleagues such as Yasuo Kiyohara and Ikuo Sunaka. Together, they have contributed to the development of cutting-edge technologies that are vital for advancing semiconductor manufacturing processes.

Conclusion: Hidetomo Uemukai’s contributions to the field of semiconductor technology through his patents reflect his innovative spirit and commitment to advancing substrate processing solutions. His work not only enhances production efficiency but also represents a significant step forward in semiconductor manufacturing techniques. As the industry continues to evolve, inventors like Uemukai play a critical role in shaping its future.

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