This inventor holds 10 USPTO granted patents and 1 published patent application. Top assignees: Hitachi, Ltd., Hitachi Microcomputer System, Ltd., Hitachi Ulsi Engineering Corp.. Active years: 1999-2017.
Location History:
- Fussa, JP (1999 - 2006)
- Tokyo, JP (2009 - 2017)
Company Filing History:
2 out of 42,717 
1 out of 64 
1 out of 87 
Years Active: 1999-2017
Title: Innovations by Inventor Hideaki Tsugane
Introduction
Hideaki Tsugane is a prominent inventor based in Fussa, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 10 patents. His work focuses on improving the reliability and efficiency of semiconductor devices and manufacturing processes.
Latest Patents
Tsugane's latest patents include a method of manufacturing semiconductor devices and a sputtering apparatus. This innovation enhances the reliability of semiconductor devices while increasing the use efficiency of sputtering apparatuses. The method involves depositing thin films over a semiconductor wafer using a magnetron sputtering apparatus equipped with a collimator. By making the region inner than the peripheral part of the collimator thinner, the uniformity of the thin film in the wafer plane is preserved, even as the integrated usage of the target increases.
Another notable patent is a method of dry cleaning the silicon surface prior to forming a self-aligned nickel silicide layer. This method involves placing a semiconductor wafer over a wafer stage in a dry cleaning chamber and treating it with a reducing gas. The wafer is then subjected to heat treatment at specific temperatures to remove any remaining products on its surface. This innovation significantly improves the reliability and production yield of semiconductor devices by reducing variations in the electrical properties of the nickel silicide layer.
Career Highlights
Throughout his career, Tsugane has worked with notable companies, including Hitachi, Ltd. His experience in the semiconductor industry has allowed him to develop groundbreaking technologies that have advanced the field.
Collaborations
Tsugane has collaborated with esteemed colleagues such as Hiroyuki Uchiyama and Shinji Nishihara. Their combined expertise has contributed to the successful development of innovative semiconductor technologies.
Conclusion
Hideaki Tsugane's contributions to semiconductor technology through his patents and collaborations have made a significant impact on the industry. His innovative methods continue to enhance the reliability and efficiency of semiconductor devices, showcasing his importance as an inventor.