Hideaki Matsubara

Title: **Innovative Contributions of Inventor Hideaki Matsubara**

Introduction

Hideaki Matsubara is a notable inventor based in Kyoto, Japan, recognized for his significant contributions in the field of substrate processing and plating technologies. With a total of six patents to his name, Matsubara has demonstrated a profound understanding of substrate management and enhancement techniques, making a lasting impact on the industry.

Latest Patents

Matsubara's latest innovations include two groundbreaking patents. The first is a "Substrate processing method of and substrate processing apparatus for freezing and cleaning substrate," which outlines a process where a substrate, after being immersed in pure water and washed, is transported to a spin-processing unit. In this unit, the substrate rotates, allowing for precise adjustments to the aqueous film on its surface. The innovative approach of freezing the aqueous film weakens the adhesion between the substrate and any particles, facilitating their removal.

The second patent, "Plating apparatus, cartridge and copper dissolution tank for use in the plating apparatus, and plating method," describes a sophisticated plating apparatus equipped with three copper dissolution tanks. These tanks are integral to the plating liquid circulation path, supplying copper ions to enhance the plating process. The design incorporates unique features, including detachable cartridges housing copper sources, which improve operational efficiency and adaptability.

Career Highlights

Throughout his career, Hideaki Matsubara has been associated with esteemed companies such as Dainippon Screen Mfg. Co., Ltd. and Dainippon Screen Manufacturing Co., Ltd. His work within these organizations has allowed him to refine his expertise in innovations related to substrate processing and plating technologies, making him a valuable asset to the field.

Collaborations

Matsubara has collaborated with several distinguished colleagues, including Sadao Hirae and Motohiro Kouno. Their combined efforts reflect a commitment to advancing technology and fostering an environment of innovation within the industry.

Conclusion

Hideaki Matsubara's contributions as an inventor have played a crucial role in shaping modern substrate processing and plating methods. His patents not only showcase his inventive expertise but also highlight the importance of collaboration and innovation in achieving technological advancements. As the field continues to evolve, Matsubara's work will undoubtedly serve as a foundation for future developments in these critical areas.