Substrate processing method of and substrate processing apparatus for freezing and cleaning substrate

Abstract

A substrate immersed in pure water held inside a processing bath disposed to a cleaning unitand accordingly washed, as it bears an aqueous film on its surface, is transported by a substrate transportation mechanismto a spin-processing unit. The substrate rotates in the spin-processing unit, thereby adjusting the thickness of the aqueous film on the substrate surface. As the aqueous film is then frozen, the volume of the aqueous film expands, adhesion between the substrates and particles adhering to the substrate surface becomes weak, or further the particles are separated from the substrate surface. The substrate transportation mechanismtransports thus frozen substrate to the cleaning unitfrom the spin-processing unit, and the substrate is immersed in a processing liquid held inside the processing bath. The overflowing processing liquid thaws and removes the aqueous film, and particles on the substrate surface are discharged outside the substrate.