The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2007
Filed:
Mar. 31, 2003
Yasuhiro Mizohata, Kyoto, JP;
Hideaki Matsubara, Kyoto, JP;
Masahiro Miyagi, Kyoto, JP;
Ryuichi Hayama, Kyoto, JP;
Yasuhiro Mizohata, Kyoto, JP;
Hideaki Matsubara, Kyoto, JP;
Masahiro Miyagi, Kyoto, JP;
Ryuichi Hayama, Kyoto, JP;
Abstract
A plating apparatus () provided with: a plating vessel (to) having a cylindrical side wall () for containing a plating liquid; a substrate holding mechanism (to) for generally horizontally holding a generally round substrate (W) to be treated; a cathode ring () provided in the substrate holding mechanism and having substantially the same inner diameter as the plating vessel for sealing a peripheral edge portion of a lower surface of the substrate, the cathode ring having a cathode () to be brought into contact with the substrate held by the substrate holding mechanism; and a rotative driving mechanism () for rotating the substrate held by the substrate holding mechanism together with the cathode ring; wherein the plating vessel has an upper edge portion complementary in configuration to a portion of the cathode ring opposed to the plating vessel so that the lower surface of the substrate held by the substrate holding mechanism can approach the plating vessel so as to be substantially flush with the upper edge of the plating vessel without interference between the upper edge portion of the plating vessel and the cathode ring.