Company Filing History:
Years Active: 2007
Title: Innovations by Herschel Marchman
Introduction
Herschel Marchman is an accomplished inventor based in San Jose, California. He has made significant contributions to the field of metrology, particularly in systems designed to reduce distortion during analysis processes. His innovative work has led to the development of a patent that addresses critical challenges in the measurement of resist features.
Latest Patents
Herschel Marchman holds a patent for "Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis." This patent includes various systems that utilize an electron beam metrology tool to measure characteristics of resist features on a specimen. The technology is particularly focused on minimizing distortion during measurements, which is crucial for accurate analysis. The systems incorporate features such as a cooling subsystem to manage the temperature of the specimen and a drying subsystem to reduce moisture, ensuring that resist features remain undistorted during the measurement process.
Career Highlights
Marchman is currently employed at KLA-Tencor Technologies Corporation, a leading company in the field of semiconductor process control and yield management. His work at KLA-Tencor has allowed him to collaborate with other talented professionals in the industry, contributing to advancements in metrology technology.
Collaborations
Some of his notable coworkers include Peter Nunan and Muhran Nasser-Ghodsi. Their collaborative efforts have further enhanced the innovative capabilities of the team at KLA-Tencor.
Conclusion
Herschel Marchman is a notable inventor whose work in metrology has led to significant advancements in the field. His patent reflects a commitment to improving measurement accuracy and reducing distortion, showcasing his innovative spirit and technical expertise.