Kla-Tencor Technologies Corporation

Herschel Marchman

Rudy Flores Garcia

David Aitan Soltz

Peter Nunan

Mark Borowicz

Tzu Chin Chuang

Muhran Nasser-Ghodsi

Various systems configured to reduce distortion of a resist during a metrology process are provided. The systems include an electron beam metrology tool configured to measure one or more characteristics of one or more resist features formed on a specimen. The electron beam metrology tool may be configured as a scanning electron microscope. The resist may be designed for exposure at a wavelength of about 193 nm. One system includes a cooling subsystem configured to alter a temperature of the specimen during measurements by the tool such that the resist feature(s) are not substantially distorted during the measurements. Another system includes a drying subsystem that is configured to reduce moisture proximate the specimen during measurements by the electron beam metrology tool such that the resist feature(s) are not substantially distorted during the measurements. An additional system may include both the cooling subsystem and the drying subsystem.

Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis

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San Jose, CA, United States of America

Herschel Marchman