Location History:
- Lexington, MA (US) (1991)
- Arlington, MA (US) (1995)
- Chestnut Hill, MA (US) (1999 - 2006)
Company Filing History:
10 out of 8,369 
2 out of 399 
2 out of 101 Years Active: 1991-2006
Title: Herbert H. Sawin: Innovator in Plasma Processing Technology
Introduction
Herbert H. Sawin is a notable inventor based in Chestnut Hill, MA (US), recognized for his contributions to the field of plasma processing technology. With a total of 13 patents to his name, he has made significant advancements that enhance the efficiency and safety of semiconductor manufacturing processes.
Latest Patents
One of his latest patents is titled "Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processing." This invention outlines a method for creating and transporting low-energy ions for use in plasma processing of semiconductor wafers. The process involves generating plasma from a gas species to produce a plasma exhaust, which is then introduced into a processing chamber containing the wafer. By activating a supplemental ion source, the ion content of the plasma exhaust is enhanced, creating a primary plasma discharge. This discharge is directed into a baffle plate assembly, resulting in a secondary plasma discharge. The strength of the electric field exerted on ions in the secondary plasma discharge is reduced, allowing ions to bombard the wafer at an energy level that does not damage the semiconductor devices formed on it.
Career Highlights
Herbert H. Sawin has had a distinguished career, working with prestigious organizations such as the Massachusetts Institute of Technology and Axcelis Technologies, Inc. His work has been pivotal in advancing the technology used in semiconductor fabrication, making processes safer and more efficient.
Collaborations
Throughout his career, Sawin has collaborated with esteemed colleagues, including Karen K. Gleason and Scott J. Limb. These collaborations have contributed to the innovative developments in plasma processing technology.
Conclusion
Herbert H. Sawin's contributions to the field of plasma processing technology have made a lasting impact on semiconductor manufacturing. His innovative patents and collaborations with leading institutions highlight his role as a key figure in advancing this critical area of technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.