Henry H Au

Title: Henry H Au: Innovator in Polishing Apparatus and Thermal Measurement Technologies

Introduction

Henry H Au is a notable inventor based in San Jose, CA. He has made significant contributions to the field of semiconductor processing through his innovative patents. With a total of 2 patents, Au has developed technologies that enhance the efficiency and accuracy of various manufacturing processes.

Latest Patents

One of his latest patents is the "Polishing apparatus with grooved subpad." This invention describes a polishing apparatus that includes a rotatable platen and a drive mechanism to incrementally advance a polishing sheet. The subpad on the platen features a groove that, when connected to a vacuum source, pulls portions of the polishing sheet into the groove, inducing a groove in the polishing surface. This design improves the polishing process significantly.

Another notable patent is the "Scanning system for rapid thermal cycle stress/curvature measurement." This technology allows for accurate measurements of substrate surface curvature by scanning the substrate while rotating it during rapid thermal processing. The rotation ensures uniform heating of the substrate, which is crucial for efficient semiconductor wafer processing. The heat sources are controlled based on temperature measurements, providing feedback for precise cycling.

Career Highlights

Henry H Au has worked with prominent companies in the semiconductor industry, including Applied Materials, Inc. His experience in these organizations has contributed to his expertise in developing innovative solutions for manufacturing challenges.

Collaborations

Throughout his career, Au has collaborated with talented individuals such as Steven M Zuniga and Peter McReynolds. These partnerships have likely fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Henry H Au is a distinguished inventor whose work in polishing apparatus and thermal measurement technologies has made a significant impact on the semiconductor industry. His patents reflect a commitment to enhancing manufacturing processes and improving product quality.