The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2009
Filed:
Feb. 15, 2007
Steven M. Zuniga, Soquel, CA (US);
Peter Mcreynolds, San Mateo, CA (US);
Erik S. Rondum, San Ramon, CA (US);
Benjamin A. Bonner, San Jose, CA (US);
Henry H. AU, San Jose, CA (US);
Gregory E. Menk, Pleasanton, CA (US);
Gopalakrishna B. Prabhu, San Jose, CA (US);
Anand N. Iyer, Santa Clara, CA (US);
Garlen C. Leung, San Jose, CA (US);
Steven M. Zuniga, Soquel, CA (US);
Peter McReynolds, San Mateo, CA (US);
Erik S. Rondum, San Ramon, CA (US);
Benjamin A. Bonner, San Jose, CA (US);
Henry H. Au, San Jose, CA (US);
Gregory E. Menk, Pleasanton, CA (US);
Gopalakrishna B. Prabhu, San Jose, CA (US);
Anand N. Iyer, Santa Clara, CA (US);
Garlen C. Leung, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A polishing apparatus is described. The polishing apparatus includes a rotatable platen, a drive mechanism to incrementally advance a polishing sheet having a polishing surface in a linear direction across the platen, a subpad on the platen to support the polishing sheet, the subpad having a groove formed therein, and a vacuum source connected to the groove of the subpad and configured to apply a vacuum sufficient to pull portions of the polishing sheet into the groove of the subpad to induce a groove in the polishing surface.