Henning Stoschus

Title: The Innovations of Henning Stoschus

Introduction

Henning Stoschus is a notable inventor based in Wetzlar, Germany. He has made significant contributions to the field of electron beam technology, holding a total of three patents. His work focuses on enhancing the performance and accuracy of electron beam systems.

Latest Patents

Stoschus's latest patents include innovative methods for the detection and correction of system responses in real-time. One of his patents describes methods, systems, and apparatuses for correcting a response function of an electron beam tool. This involves modulating an electron beam parameter, emitting the beam towards a specimen, and detecting scattered electrons to yield valuable electron data. The process includes determining a phase delay between the source phase and the electron phase, which is crucial for correcting the response function of the electron beam tool. Another patent outlines a detection and correction method for an electron beam system, which includes modulating the beam current and detecting secondary and backscattered electrons to obtain a detection signal. This method emphasizes the importance of filtering the detection signal based on the phase shift between the beam signal and the detection signal.

Career Highlights

Henning Stoschus is currently employed at Kla Corporation, where he continues to develop cutting-edge technologies in electron beam systems. His expertise and innovative approach have positioned him as a key figure in his field.

Collaborations

Stoschus has collaborated with notable colleagues, including Stefan Eyring and Christopher Sears, contributing to advancements in electron beam technology.

Conclusion

Henning Stoschus is a distinguished inventor whose work in electron beam technology has led to significant advancements in the field. His patents reflect a commitment to innovation and excellence, making him a valuable asset to Kla Corporation and the broader scientific community.