The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2022
Filed:
Nov. 22, 2019
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Assignee:
KLA CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/304 (2006.01); G01N 23/2251 (2018.01); H01J 37/22 (2006.01); H01L 21/66 (2006.01); G06N 20/00 (2019.01);
U.S. Cl.
CPC ...
H01J 37/304 (2013.01); G01N 23/2251 (2013.01); G06N 20/00 (2019.01); H01J 37/222 (2013.01); H01L 22/12 (2013.01); H01J 2237/221 (2013.01); H01J 2237/24475 (2013.01);
Abstract
A detection and correction method for an electron beam system are provided. The method includes emitting an electron beam towards a specimen; modulating a beam current of the electron beam to obtain a beam signal. The method further includes detecting, using an electron detector, secondary and/or backscattered electrons emitted by the specimen to obtain electron data, wherein the electron data defines a detection signal. The method further includes determining, using a processor, a phase shift between the beam signal and the detection signal. The method further includes filtering, using the processor, the detection signal based on the phase shift.