Company Filing History:
Years Active: 2021-2023
Title: Innovator Profile: Hendrik Steigerwald
Introduction: Hendrik Steigerwald, hailing from Urmitz, Germany, is a prominent inventor known for his contributions to the field of photolithography. With two patents to his name, he has made significant strides in developing methods and apparatuses that address the challenges associated with defects in photolithographic masks, specifically for the extreme ultraviolet (EUV) wavelength range.
Latest Patents: Steigerwald's latest patents focus on a method and an apparatus for repairing defects in photolithographic masks for the EUV range. The invention outlines a systematic approach that includes several key steps: first, determining the specific defects present; second, ascertaining a repair shape that addresses these defects; and finally, applying a diffraction-based technique to account for any phase disturbances caused by the defects. This innovative method enhances the precision and effectiveness of repairs, ensuring high-quality photolithography processes.
Career Highlights: Hendrik Steigerwald is currently associated with Carl Zeiss SMT GmbH, a leading company in optical systems and solutions. His work has significantly advanced the field of photolithography, particularly in the EUV range, which is critical for modern semiconductor manufacturing processes.
Collaborations: During his career, Steigerwald has collaborated with notable colleagues, including Renzo Capelli. Together, they have explored innovative solutions to complex challenges faced in the industry, further contributing to advancements in photolithic technologies.
Conclusion: Hendrik Steigerwald's inventive prowess and commitment to innovation in the realm of photolithography showcase his vital role in pushing the boundaries of technology. Through his patents and collaborations, he continues to influence the field, making strides that benefit both his company and the broader semiconductor industry. His work is a testament to the power of innovation in driving progress and solving industry challenges.