Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (2 from 1,410 patents)
2 patents:
1. 11774848 - Method and apparatus for repairing defects of a photolithographic mask for the EUV range
2. 11079673 - Method and apparatus for repairing defects of a photolithographic mask for the EUV range