Location History:
- Burghausen, DE (1977 - 1978)
- Emmerting, DE (1991 - 2000)
Company Filing History:
4 out of 113 
1 out of 42 
Years Active: 1977-2000
Title: Helmut Kirschner: Innovator in Semiconductor Technology
Introduction
Helmut Kirschner is a notable inventor based in Burghausen, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on processes and devices that enhance the efficiency and effectiveness of semiconductor wafer polishing.
Latest Patents
One of his latest patents is a "Process and device for polishing semiconductor wafers." This innovation involves pressing at least one side of a semiconductor wafer against a polishing plate, over which a polishing cloth is stretched. The semiconductor wafer and the polishing plate are moved relative to each other to achieve the desired polish. During this process, the wafer traverses at least two regions on the polishing plate, which have defined radial widths and varying temperatures. Temperature-control mechanisms are integrated into the polishing plate to set the number, radial widths, and temperatures of these regions prior to polishing.
Another significant patent is the "Process for the hydrophilizing and/or cement-residue-removing surface." This process allows silicon wafers to be treated to achieve a hydrophilic surface and to remove cement residues from the polishing operation. The treatment utilizes solutions with a pH of 8 to 14, containing alkali-metal or alkaline-earth-metal compounds along with hydrogen peroxide. Remarkably, these processes can be performed at room temperature, showcasing low chemical consumption and ease of management.
Career Highlights
Throughout his career, Helmut Kirschner has worked with prominent companies in the semiconductor industry. Notable among these are Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH and Wacker Siltronic Gesellschaft für Halbleitermaterialien AG. His experience in these organizations has contributed to his expertise and innovative capabilities in semiconductor technology.
Collaborations
Helmut has collaborated with several professionals in his field, including Rudolf Griesshammer and Gunther Lechner. These collaborations have likely enriched his work and led to advancements in semiconductor processes.
Conclusion
Helmut Kirschner's contributions to semiconductor technology through his innovative patents and career experiences highlight his importance in the field. His work continues to influence the efficiency of semiconductor wafer polishing processes.