Helene Del Puppo

Title: Helene Del Puppo: Innovator in Semiconductor Fabrication

Introduction

Helene Del Puppo is a prominent inventor based in Fremont, CA (US). She has made significant contributions to the field of semiconductor fabrication, holding a total of 5 patents. Her innovative work focuses on improving etching processes, which are crucial for the development of semiconductor devices.

Latest Patents

One of her latest patents is titled "Internal plasma grid applications for semiconductor fabrication." This invention pertains to improved methods and apparatus for etching a semiconductor substrate. A plasma grid assembly is positioned in a reaction chamber to divide the chamber into upper and lower sub-chambers. The plasma grid assembly may include one or more plasma grids having slots of a particular aspect ratio, which allow certain species to pass through from the upper sub-chamber to the lower sub-chamber. In some cases, an electron-ion plasma is generated in the upper sub-chamber. Electrons that make it through the grid to the lower sub-chamber are cooled as they pass through. This results in an ion-ion plasma in the lower sub-chamber, which may be used to advantage in a variety of etching processes.

Another notable patent is "Residue free systems and methods for isotropically etching silicon in tight spaces." This invention includes systems and methods for etching a substrate that consists of a first structure and a dummy structure in a processing chamber. The first structure is made of a material selected from a group consisting of silicon dioxide and silicon nitride, while the dummy structure is made of silicon. Carrier gas, nitrogen trifluoride, and molecular hydrogen gas are supplied to the processing chamber, where plasma is generated, and the dummy structure is etched.

Career Highlights

Helene Del Puppo has established herself as a key figure in the semiconductor industry through her work at Lam Research Corporation. Her expertise in etching technologies has led to advancements that benefit the manufacturing processes of semiconductor devices.

Collaborations

Throughout her career, Helene has collaborated with talented individuals such as Gowri Kamarthy and Alex Paterson. These collaborations have fostered an environment of innovation and creativity, contributing to the success of their projects.

Conclusion

Helene Del Puppo's contributions to semiconductor fabrication through her patents and collaborations highlight her role as an influential inventor in the industry. Her work continues to pave the