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Kottingbrunn, Austria

Heinz Steinhardt

USPTO Granted Patents = 3

Average Co-Inventor Count = 3.0

ph-index = 2

Forward Citations = 17(Granted Patents)

Location History:

Wien, DE (1996)
Kottingbrunn, AT (2004 - 2010)

Company Filing History:

R3t Gmbh Rapid Reactive Radicals Technology

Secon Halbleiterproduktionsgeraete Gesellschaft Mbh

Years Active: 1996-2010

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3 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7665416 - Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles (2010-02-23),

2. 6706141 - Device to generate excited/ionized particles in a plasma (2004-03-16),

3. 5489362 - Method for generating excited neutral particles for etching and (1996-02-06),

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