R3t Gmbh Rapid Reactive Radicals Technology

Secon Halbleiterproduktionsgeraete Gesellschaft Mbh

Heinz Steinhardt

Josef Mathuni

Alexander Gschwandtner

Alexander Mattheus

Jürgen Sellmaier

Stephan Schneider

An apparatus is described for generating excited and/or ionized particles in a plasma with a generator for generating an electromagnetic wave and an excitation chamber with a plasma zone in which the excited and/or ionized particles are formed. At least one excitation chamber is arranged in an insulating material off-center relative to a ring-cylindrical outer conductor.

Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles

A device to generate excited and/or ionized particles in plasma with a generator to generate an electromagnetic wave and at least one plasma zone, in which the excited and/or ionized particles are formed by the electromagnetic wave. The plasma zone is formed in an interior chamber of a conductor for the electromagnetic wave.

Device to generate excited/ionized particles in a plasma

Method for generating excited neutral particles for etching and

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Kottingbrunn, Austria

Heinz Steinhardt