The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2010
Filed:
Jun. 12, 2006
Alexander Gschwandtner, Munich, DE;
Josef Mathuni, Munich, DE;
Alexander Mattheus, Taufkirchen, DE;
Stephan Schneider, Taufkirchen, DE;
Jürgen Sellmaier, Munich, DE;
Heinz Steinhardt, Kottingbrunn, AT;
Alexander Gschwandtner, Munich, DE;
Josef Mathuni, Munich, DE;
Alexander Mattheus, Taufkirchen, DE;
Stephan Schneider, Taufkirchen, DE;
Jürgen Sellmaier, Munich, DE;
Heinz Steinhardt, Kottingbrunn, AT;
R3T GmbH Rapid Reactive Radicals Technology, Taufkirchen, DE;
Abstract
An apparatus is described for generating excited and/or ionized particles in a plasma with a generator for generating an electromagnetic wave and an excitation chamber with a plasma zone in which the excited and/or ionized particles are formed. At least one excitation chamber is arranged in an insulating material off-center relative to a ring-cylindrical outer conductor.