The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2004
Filed:
Jul. 21, 2000
Applicant:
Inventors:
Heinz Steinhardt, Kottingbrunn, AT;
Alexander Gschwandtner, München, DE;
Josef Mathuni, München, DE;
Assignee:
R3T Rapid Reactive Radicals Technology, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/00 ; C23C 1/600 ; H01J 2/100 ;
U.S. Cl.
CPC ...
H05H 1/00 ; C23C 1/600 ; H01J 2/100 ;
Abstract
A device to generate excited and/or ionized particles in plasma with a generator to generate an electromagnetic wave and at least one plasma zone, in which the excited and/or ionized particles are formed by the electromagnetic wave. The plasma zone is formed in an interior chamber of a conductor for the electromagnetic wave.