Osan-si, South Korea

HeeSung Kang

USPTO Granted Patents = 5 

Average Co-Inventor Count = 3.1

ph-index = 1


Company Filing History:


Years Active: 2023-2025

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5 patents (USPTO):Explore Patents

Title: HeeSung Kang: Innovator in Thin-Film Deposition Technologies

Introduction

HeeSung Kang is a prominent inventor based in Osan-si, South Korea. He has made significant contributions to the field of thin-film deposition, holding a total of 5 patents. His innovative approaches have advanced the technology used in various applications, particularly in substrate processing.

Latest Patents

Among his latest patents, HeeSung Kang has developed a thin-film deposition method and system. This method involves forming a film on a substrate using a series of plasma conditions to ensure good film thickness uniformity. Additionally, he has created a substrate processing method that effectively fills a film in a gap structure without forming voids or seams. This method includes multiple steps, such as forming a thin film, etching, and supplying various gases to achieve the desired results.

Career Highlights

HeeSung Kang is currently employed at ASM IP Holding B.V., where he continues to innovate in the field of thin-film technologies. His work has been instrumental in enhancing the efficiency and effectiveness of substrate processing methods.

Collaborations

HeeSung has collaborated with notable coworkers, including SeokJae Oh and WanGyu Lim. Their combined expertise has contributed to the successful development of advanced technologies in their field.

Conclusion

HeeSung Kang's contributions to thin-film deposition and substrate processing highlight his role as a leading inventor in the industry. His innovative patents and collaborative efforts continue to shape the future of technology in this area.

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