Haw Yen

Title: The Innovations of Haw Yen

Introduction

Haw Yen is a prominent inventor based in Hsin Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work focuses on developing advanced methods for creating manufacturable polycide contacts, which are essential for modern semiconductor designs.

Latest Patents

One of his latest patents involves tungsten policide contacts for semiconductor devices. This method allows for the creation of polycide contacts that can be used in advanced semiconductor designs with features as small as 0.35 micrometers. The process utilizes an amorphous silicon film as an underlay to facilitate the growth of an overlying tungsten silicide layer. The deposition of tungsten silicide is achieved using tungsten hexafluoride and silane, resulting in excellent step coverage in narrow contact holes. A nitrogen anneal with high flow rates optimizes the adhesion characteristics of the tungsten polycide structure.

Another notable patent is the optimized tungsten contact plug process, which fills small diameter contact holes with tungsten without damaging the contact hole liner materials during deposition. This process employs a titanium nitride barrier layer over a titanium adhesive layer. The barrier characteristics of titanium nitride are enhanced through an anneal cycle in a nitrogen ambient, producing a more robust barrier by incorporating additional nitrogen into the deposited titanium nitride layer.

Career Highlights

Haw Yen is currently employed at Vanguard International Semiconductor Corporation, where he continues to innovate in the semiconductor field. His expertise and contributions have positioned him as a key figure in the development of advanced semiconductor technologies.

Collaborations

Haw Yen has collaborated with notable coworkers, including Shaw-Tzeng Hsia and Shaw-Tseng Hsia, further enhancing the innovative environment at his workplace.

Conclusion

Haw Yen's contributions to semiconductor technology through his patents and work at Vanguard International Semiconductor Corporation highlight his significant role in advancing the industry. His innovative methods for tungsten policide contacts and optimized tungsten contact plug processes are paving the way for future developments in semiconductor design.