Company Filing History:
Years Active: 1997-1999
Title: Innovations and Contributions of Haruhiro (Harry) Goto in Semiconductor Technology
Introduction
Haruhiro (Harry) Goto, an accomplished inventor based in Saratoga, California, is recognized for his significant contributions to the field of semiconductor technology. With a total of four patents under his name, his work has greatly influenced the precision and efficiency of semiconductor fabrication processes.
Latest Patents
Among his most notable inventions is the patented method titled "Tapered Dielectric Etch in Semiconductor Devices." This innovative technique employs a unique etchant gas system of sulfur hexafluoride and chlorine to etch openings in dielectric layers, allowing for sloped sidewalls with a taper angle ranging from 20 degrees to 85 degrees. This method enhances step coverage and profile control during the Thin-Film Transistor (TFT) fabrication process.
Additionally, Goto has developed a "Method and Apparatus for Etching Film Layers on Large Substrates." This patent includes a specialized chamber designed for etching substrates while addressing the challenges of high power densities, particularly when working with substrates that have aluminum films. The chamber features a support member capable of rotating to facilitate substrate handling and processing without causing arcing, showcasing Goto's attention to both innovation and practicality in his designs.
Career Highlights
Haruhiro Goto is currently affiliated with Applied Komatsu Technology, Inc., where he continues to push the boundaries of semiconductor manufacturing techniques. His career reflects a commitment to enhancing the efficiency of fabrication processes, making significant strides in achieving better results in the industry.
Collaborations
Throughout his career, Goto has collaborated with other prominent figures in the field, including his coworkers Yuh-Jia (Jim) Su and Yuen-Kui (Jerry) Wong. These partnerships have fostered an environment of creativity and innovation, contributing to the successful development and implementation of advanced technologies.
Conclusion
Haruhiro (Harry) Goto’s inventive spirit and dedication to the semiconductor field exemplify the profound impact of innovation on technology. His patents not only showcase his technical prowess but also pave the way for future advancements in semiconductor manufacturing, demonstrating how individual contributions can lead to significant industry evolution.