This inventor holds 4 USPTO granted patents and 1 EPO patent. Top assignees: Lam Research Corporation, Applied Komatsu Technology, Inc.. Active years: 1999-2004.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1999-2004
Title: Harlan I Halsey - Innovator in Semiconductor Technology
Introduction
Harlan I Halsey, based in Woodside, CA, is a prominent inventor known for his contributions to semiconductor technology. With a remarkable portfolio of four patents, Halsey's work focuses primarily on enhancing efficiency in semiconductor manufacturing processes.
Latest Patents
Among Halsey's latest inventions is a patent for methods to minimize moisture condensation over a substrate in a rapid cycle chamber. This innovative chamber allows for the safe transition of a semiconductor substrate between modules that operate at varying pressures. The design incorporates a base that defines an outlet to facilitate the removal of the atmosphere within the chamber, creating a vacuum. Moreover, it includes a substrate support and a chamber top with an inlet specifically for introducing gas to displace moisture above the substrate.
Another significant patent involves a diffuser and rapid cycle chamber designed for venting and/or pumping gas. This invention features a unique body with a nozzle at its center and a reflector that directs gas from the nozzle into an open space. The set of vanes within the design aids in dividing the gas flow into equal portions, ensuring the gas exits uniformly at a low velocity.
Career Highlights
Harlan I Halsey's impressive career includes significant roles at major companies in the semiconductor industry, most notably at Lam Research Corporation and Applied Komatsu Technology, Inc. His work in these organizations has contributed greatly to advancements in semiconductor processing technologies.
Collaborations
Throughout his career, Halsey has collaborated with notable colleagues such as David E. Jacob and Richard Ernest Demaray. These partnerships have enabled the exchange of ideas and fostered innovation within the field of semiconductor technology.
Conclusion
Harlan I Halsey's innovative spirit and contributions to semiconductor technology underscore his importance in the field. His patents continue to influence advanced manufacturing techniques, ensuring efficiency and reliability in semiconductor processes. Halsey's work exemplifies the impact that dedicated inventors can have on evolving technologies.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile